MEMS Technology — The Advanced Sensors of Todays’ Generation

Introduction

Micro-Electro-Mechanical Systems (MEMS) is a technology fabricated using microfabrication technology defined as miniaturized mechanical and electro-mechanical elements. The dimension of MEMS devices may vary from 1 Micron to several millimeters. The types of MEMS can vary from simple structures having no moving elements to extremely complex electromechanical systems with multiple moving components fabricated on a single chip under the control of integrated microelectronics. The most notable elements are microsensors and micro actuators.

MEMS are transducers — a device that converts one form of energy to another form. As in sensors, there is a need for the conversion of the mechanical signal to an electrical signal. MEMS are low-cost and high accuracy sensors that can be used for an extensive range of industrial applications. These sensors are used to measure and detect external stimuli like pressure, speed, and many more.

MEMS technology is an extended version of the traditional Integrated circuit (IC) manufacturing. The main difference between IC fabrication also known as VLSI (Very Large Scale Integration) and MEMS is in IC we only fabricate electrical components like inductors, capacitors but in MEMS mechanical components like gears, beams, springs, etc. are fabricated on a single chip.

MEMS Sensors working principle:

Whenever tilt or change is applied to the sensor, then a difference within electric potential is generated. This can also be measured as a change in capacitance. Then that change difference indicating signal is linked is derived in electrical form.

These sensors are in great demand in industrial automation, position control, platform leveling, pitch measurement, and many more.

Types of MEMS:

MEMS Accelerometers: For electronic stability control and airbag deployment

MEMS Gyroscopes: For measuring yaw, pitch, and roll for autonomous driving.

MEMS Pressure Sensors: Tire Pressure Monitoring System and braking control

MEMS Magnetic field sensors: For direction used in navigation

MEMS Applications:

1. Inkjet printers: It uses piezoelectric bubble ejection to deposit ink on the paper.
2. Accelerometers: used for airbag deployment and electronic stability control
3. Inertial measurement units: MEMS gyroscopes, MEMS Magnetometer, and MEMS accelerometers are used in remote control or autonomous helicopters, planes, drones. They have high usage in Inertial navigation systems (INSs) of modern cars. Submarines, planes for example autopilot mode of an airplane is possible only due to MEMS.
4. Accelerometers are used in electronic devices, especially as game controllers.
5. MEMS inertial sensors are also being used in every car as well as in the customer electronic handhelds such as Apple iPhones.
6. With the integration of inductors and tunable capacitors, the performance of communication circuits will improve, while the total circuit area, power consumption, and cost will be reduced.
7. Optician switching technology is widely used for data communication.
8. MEMS pressure sensors are widely used in the medical sector to monitor blood pressure during intensive care.
9. During birth, MEMS pressure sensors are used to measure intrauterine pressure.
10. The MEMS pressure sensors have big application in respiratory monitoring and are used in ventilators to monitor the patient’s breathing.
11. MEMS pressure sensors are used in drug infusion pumps to monitor the flow rate and detect obstructions and blockages that indicate whether the drug is properly delivered to the patient or not.
12. RF-MEMS has wider application in resonators and acts as mechanical filters for communication circuits.

MEMS Growth and Future:

You can estimate the growth projection from the fact that in 2005 when MEMS started the value of product rising was up to $8 billion and with the rapid increase curve this value has raised to $40 billion in 2015 and estimated to be $200 billion in 2025.

This growth is the response of the combination of technology displacement as used by airbag accelerometers, automotive pressure sensors, and some new products like MEMS RF devices, miniaturized guidance systems. Some of the one going research of MEMS products include disposable chips for performing assays on blood and tissue samples, processing chips and integrated optical switching, as well as various remote sensing and RF communication products.

In particular, MEMS are much suitable for detection, analysis, and mitigation of damage. New, and very capable devices are being developed that will become available in the future and revolutionize the industry.